by
HORIBA Europe GmbH
The GA-360E/F360E Series is a line up of units that provide ultrahigh sensitive, highly accurate, continuous monitoring of trace amounts of impurities contained in gases (N2, O2, He, Ar, H2, and Air) used in the semiconductor manufacturing process. Utilizing a cross-modulation method, GA-360E/F360 Series units have no zero drift due to the ...