High-sensitivity, fast-response monitoring of PFC and abatement tool emissions by FTIR spectroscopy

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Semiconductor fab plants are faced with real-time monitoring and reduction of their PFC emissions to meet SEMI Environmental, Health and Safety (EHS) requirements. In some cases emissions are continuous, while in other cases they are intermittent or random.

Also, in-situ real-time process control is becoming a critical element of yield enhacement.

Solution: FTIR Spectroscopy

  • In-Situ real-time gas analysis of all infrared-active molecules after and beofre abatement systems and otherprocess areas
  • High performance and fast quantitative analysis
  • Rugged solution capable of working on corrosive environments

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