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SEMILAB Semiconductor Physics Laboratory Co., Ltd.
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LST-300ALST is a powerful tool for monitoring bulk micro defect (BMD) profile of silicon samples. The BMD scatters the incident light which is recorded by a CCD camera near to the cleaved edge of the sample. |
ACV-3000ACV delivers the industry’s first realtime, non-contact method to measure epi layer resistivity profiles in production. Fast feedback and the availability of resistivity profile plots and wafer maps aid in troubleshooting for still higher control over epi processes. |

