Air & Climate Applications

Anguil customers in the Semiconductor and Electronics industries include chip manufacturers, printed circuit board makers, LCD (Liquid Crystal Display) manufacturers and probimer operations. Each of these processes have unique emission control challenges that all require a custom engineered system designed around the given process parameters. With Anguil`s product breadth our customers are ensured that the proper technology will be chosen.

By Anguil Environmental Systems, Inc. based in Milwaukee, WISCONSIN (USA).

Without CTP's innovative upstream systems, regenerative thermal oxidation would not be possible, which would render the waste gas purification cost-intensive and inefficient. Continuous burning off in the RTOs eliminates the deposits which periodically clog the ceramic honeycomb blocks.

By Chemisch Thermische Prozesstechnik GmbH / CTP Air Pollution Control based in Graz, AUSTRIA.

By Munters Zeol Division based in Amesbury, MASSACHUSETTS (USA).

The CTP desorption allows for an especially high concentration factor which, in turn, reduces the cost of ownership and permits an auto-thermal operation (additional burner switched off) even when the contaminant concentration is low.

By Chemisch Thermische Prozesstechnik GmbH / CTP Air Pollution Control based in Graz, AUSTRIA.

The cleaning problem of the heat exchangers was solved. The contaminants were destroyed efficiently and economically while steam for the production process was generated at no additional cost.

By Chemisch Thermische Prozesstechnik GmbH / CTP Air Pollution Control based in Graz, AUSTRIA.

The world`s appetite for electronic devices - from simple household appliances to sophisticated computers - has led to rapid growth of both these industries. Typically for the electronics industry, there are large waste gas streams (up to 400,000 Nm³/h) with relatively low concentrations of different solvents. The waste gases mainly occur in coating, cleaning and etching processes during the production of semiconductors, CDs/DVDs, Blue-ray discs, DVTs, TFT-LCD and plasma displays. The electronics industry has important standards to meet regarding environmental protection. CTP complies with these requirements: From zero emission goals, to installations on the roofs of production facilities.

By Chemisch Thermische Prozesstechnik GmbH / CTP Air Pollution Control based in Graz, AUSTRIA.

Removing all VOCs/HAPS from Semiconductor/Electronics manufacturing – commonly use regenerative thermal oxidizers (RTO) for air pollution control needs.

By Catalytic Products International (CPI) based in Lake Zurich, ILLINOIS (USA).

ERG`s purpose-designed scrubbing systems are engineered to suit each application and client`s requirements. During the microelectronics boom years in the 1990s, ERG installed a variety of plants treating acid off-gases (HF, F2, HCl, Cl2, etc) with the capability to handle the sticky silanes formed from chlorosilane hydrolysis.

By ERG (Air Pollution Control) Ltd based in Horsham, UNITED KINGDOM.

Our cleaners are used in the manufacture of semiconductors, flat panel displays, CDs, DVDs, and many other electronic items.  They remove emulsions, particulates, oil, organic and inorganic contaminants from quartz, wafers, glass, silicon, ceramics, and metals.  When rinsed properly our products leave absolutely no residue.  They are also proven in removing soils from filter membranes used in wastewater treatment systems.

By International Products Corporation based in Burlington, NEW JERSEY (USA).

Get the power tools to create sustainable success. We have worked with some of the leading technology companies in the world. In fact, thinkstep has completed hundreds of projects with ICT companies, including ecodesign assessments and programs for mobile phones, printers, computers, servers, semiconductors, car electric and electronic systems, e-motors, transformers, and many more products. With 20 years of global sustainability experience, we are deeply engaged in addressing the growing disclosure expectations on product carbon footprints, materials of concern, and labor practices in the supply chain, plus regulations on hazardous materials, toxicity, and end of life management. We don’t merely identify what you need to eliminate; we strategise with you to increase revenue, strengthen supply partnerships, and enhance your brand profile.

By thinkstep based in Leinfelden-Echterdingen, GERMANY.

Waste gas treatment is an often overlooked but important function of Semiconductor, PV and LED fabrication. Several serious accidents have taken place in factories where no abatement was installed. Even today waste treatment is often seen as a cost rather than a safety issue. There are three main reasons why waste gas treatment is installed in factories: health and safety, environmental factors, and quality control.

By Oxygen Generating Systems Intl. (OGSI) based in North Tonawanda, NEW YORK (USA).

Electric and electronic waste (WEEE), are coming from technology products such as home appliances (washing machines, vacuum cleaners), computers and tools. An economy based on the consumption such as today, provides a continuous increase of WEEE, and determines an increasing risk of dropping out in the environment or in landfills, with the consequences of pollution of soil, air, water and health human repercussions. These products should be handled properly and used for the differential recovery of the materials they are made of, such as copper, iron, steel, aluminum, glass, silver, thus avoiding a waste of resources that can be reused to build new equipment in addition to the environmental sustainability.

By SA Eng Soluzioni per l`Ambiente based in San Donà di Piave, ITALY.

Manufacturing TFT/LCD displays requires waste gas treatment as well. Processes that produce large scale Thinfilm Transistors (TFT) on glass substrates, for instance, use Chemical Vapour Deposition – CVD – to separate the thin films onto the material. The process requires cleaning the process chamber periodically and usually employs etching with NF3. Etching of the separated thin films typically utilises CF4, SF6 and chlorinated gases, which release large amounts of waste gas mixtures.

By DAS Environmental Expert GmbH based in Dresden, GERMANY.

Market analysts predict sustained growth in demand in the LED industry. After LED backlighting for the small LC displays of mobile phones and the LC displays of larger screens in the television market, the next potential growth market is the lighting industry: Sales of LEDs in this market in 2012 are almost USD 3.5 billion – thus nearly doubling since 2010. Analysts are expecting a growth of more than USD 7 billion in 2014 and believe that the total market for LEDs should peak at USD 17.7 billion.* A mass market of this scale for LEDs also means increasing emissions that need to be abated by specific waste gas treatment systems at the point of use. In the manufacture of products based on innovative light emitting diode (LED) technology, ammonia and hydrogen are used in large quantities as process gases. The environmental engineers at DAS have recognised this market trend and developed new solutions such as LARCH for waste gas treatment in MOCVD processes.

By DAS Environmental Expert GmbH based in Dresden, GERMANY.

In the early 1990s no appropriate and comprehensive technical solution had been available for waste gas treatment in the semiconductor industry. Back then as well as today many industrial and research production procedures use process gases and generate waste gases. These waste gases, considered greenhouse gases, are toxic and/or highly flammable and very often pose a significant risk to production facilities and the environment. The semiconductor industry, for instance, uses perfluorocarbons, whose global warming potential is extremely high and therefore requires an efficient waste gas treatment. Combining and transporting different gases into a fab’s central waste gas system might produce highly flammable and highly explosive gaseous mixtures, which in the past has occasionally caused the total loss of entire production facilities. Particles contained within gases may also cause exhaust blockages. To eliminate these risks, process waste gases need to be treated at the “Point-of-Use” (POU) where harmful exhausts are abated immediately.

By DAS Environmental Expert GmbH based in Dresden, GERMANY.