Climate Change Equipment With Air Quality And Industrial Gas Monitoring Systems For Semiconductor Applications For Air And Climate
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Manufactured by Teledyne APIbased in USA
The ODS series of High Concentration High Purity Ozone Gas Delivery Systems is designed for use in the most demanding semiconductor applications. This highly reliable ODS is ideal for applications requiring high concentration ozone at a wide range of flow rates. The ODS system is a complete turnkey solution that is custom configured to plug and play with most semiconductor tools. Its ...
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Manufactured by Teledyne APIbased in USA
The SCI-552 is a system controller for ozone delivery systems that provides electronic control interfaces for a number of typical system components, including: ozone generators, EV valves, mass flow controllers, back-pressure controllers, Teledyne API 452 ozone sensors, Teledyne API 470 dissolved ozone sensors, and a water chiller. The SCI-552 features hardware and software support for a number ...
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