Air pollution control for microelectronics - Electronics and Computers
ERG`s purpose-designed scrubbing systems are engineered to suit each application and client`s requirements. During the microelectronics boom years in the 1990s, ERG installed a variety of plants treating acid off-gases (HF, F2, HCl, Cl2, etc) with the capability to handle the sticky silanes formed from chlorosilane hydrolysis.
Applications Overview
During the microelectronics boom years in the 1990s, ERG installed a variety of plants treating acid off-gases (HF, F2, HCl, Cl2, etc) with the capability to handle the sticky silanes formed from chlorosilane hydrolysis.
We continue to offer high efficiency packed tower scrubbers and non-clogging and highly efficient V-tex™ scrubber packages, each optimised for clients in the micro-electronics and optical fibres sectors. And as you'd expect, each integrated system comes with an extraction ductwork system (segregated as required), a simple to operate control panel, and is backed with a process guarantee.
Demonstrating IPPC compliance is straightforward as our robust and thoroughly well-engineered systems offer peace of mind to plant operators and the community beyond the site boundary.
Quality and Certification
All ERG systems
- designed and manufactured to ERG's ISO9001 Quality Management System,
- are CE marked as required to the Pressure Equipment (97/23/EC) and ATEX (94/9/EC) Directives, and
- are designed according to British, European and International Standards.
Vessels can be supplied in accordance with PD5500, BS4994 or ASME VIII.