Analytical instruments for mass spectrometry
A variety of MS techniques – such as Quadrupole MS, Time-of-Flight (TOF) MS, Ion Mobility Spectroscopy (IMS), etc. have been developed in the past decades, providing new tools for materials analyses. Flow control for mass spectrometry (MS) requires high repeatability and small temperature- and pressure dependency. This is important to achieve a high resolution and instrument resolution. Depending on the size and electrical interface requirements, the Axetris MFC modules or MFC standalone types are the ideal choices for MS applications.