Chemiluminescense based analyzer for semiconductor applications - Electronics and Computers

We provide solutions for a wide range of complex problems associated with CMP process control. This has been used successfully in manufacturing and development lines worldwide since 1996. M17 provides a solution for a wide range of complex problems associated with CMP process control. This has been used successfully in manufacturing and development lines worldwide since 1996. The basic approach to control a CMP process containing a nitride change at the stoplayer is the foundation of this M17 system. M17 has been developed jointly by ECO PHYSICS and a leading edge semiconductor company in 1996.