Sierra Instruments, Inc.

Flow meters for the semiconductor processing - Monitoring and Testing

From bulk gas delivery to cleaning to purging operations, Sierra`s mass flow meters and controllers offer the simplicity and robustness demanded in these applications. Our ability to handle corrosive gases, high flow rates and multiple gases with the same unit makes Sierra`s mass flow meters and controllers a tool-makers choice.

OEM Tools
Semiconductor Tool Support
Wafer Cleaning & Polishing
Purging & Carrier Gases
Low Pressure Drop Control
Vacuum Processes
Bulk UHP Gas Delivery
Corrosive Gas Control
Wafer Processing
Fab Facilities Management