CIC Photonics, Inc.

Integrated real-time gas analysis solution for moisture in ammonia industry

The highest purity of ammonia is a requisite chemical gas for the production of flat panel displays and for LEDs; the purity issue is one of achieving moisture levels at the ppb level, as in the case of epitaxial reactor applications. However, the problem requiring a solution derives in part from the fact that the FTIR spectra for moisture and ammonia overlap to the degree that the moisture peaks are masked by the ammonia peaks at high concentrations. As a result the moisture peaks cannot be used for quantitative concentration measurements.