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CIC Photonics first applied its IRGAS technology to semi-gases when a major semiconductor equipment manufacturer, Applied Materials, requested a demo of its capability to monitor gas quality for epitaxial reactor applications; that was in year 2000. The IRGAS System met all of the technical requirements, which included ppb sensitivity for moisture as an impurity, gas cell chemical resistance to both acid and basic semi-gases, and fast concentration tracking time response.
By CIC Photonics based in Albuquerque, NEW MEXICO (USA).
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