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CF4 monitor Applications

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    Fluoride emissions monitoring in aluminum smelters

    Production of aluminum from its ores at aluminum smelters results in carbon dioxide CO2, carbon monoxide CO, sulfur dioxide SO2, and hydrogen fluoride HF gas emissions during the electrolytic process phase to the atmosphere. The gas emissions need to be monitored. Typically the smelters have emission limit values (ELVs) for sulfur dioxide and hydrogen fluoride emissions. These emissions should be measured accurately and with good precision, to ensure the smelter does not exceed its emission limit values. In...

    By Gasmet Technologies Oy based in Helsinki, FINLAND.

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    Gas monitoring instruments and systems for semiconductor manufacturing

    In the semiconductor manufacturing industry, various perfluorinated compounds (PFCs) are used. The emissions of the PFC compounds into the ambient air are reduced by scrubbing of the exhaust gases from the process. In this process, the Gasmet™ FTIR Gas Analyzers can be used to measure the emissions into the atmosphere and also monitor the efficiency of the scrubbers. Typically monitored PFCs in the exhaust gas include carbon tetrafluoride CF4, trifluoromethane CHF3, and hexafluoroethane C2F6.

    By Gasmet Technologies Oy based in Helsinki, FINLAND.

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