In the early 1990s no appropriate and comprehensive technical solution had been available for waste gas treatment in the semiconductor industry. Back then as well as today many industrial and research production procedures use process gases and generate waste gases. These waste gases, considered greenhouse gases, are toxic and/or highly flammable and very often pose a significant risk to production facilities and the environment. The semiconductor industry, for instance, uses perfluorocarbons, whose global warming potential is extremely high and therefore requires an efficient waste gas treatment. Combining and transporting different gases into a fab’s central waste gas system might produce highly flammable and highly explosive gaseous mixtures, which in the past has occasionally caused the total loss of entire production facilities. Particles contained within gases may also cause exhaust blockages. To eliminate these risks, process waste gases need to be treated at the “Point-of-Use” (POU) where harmful exhausts are abated immediately.
By DAS Environmental Expert GmbH based in Dresden, GERMANY.
Government and environmental groups are forcing industries with medium to high VOC exhausts to reduce emissions by as much as 98%. Incineration using pollution control devices such as oxidizers and flare stacks is one way to bring the exhaust emissions in line with the regulations. Capturing and reusing solvent in a solvent recovery system is another way.
By Control Instruments Corporation based in Fairfield, NEW JERSEY (USA).
Today, the reduction of atmospheric emissions produced by the gas processing and petrochemical industries is an acute problem. The most widely used technique of exhaust gas treatment comprises complete burning, even though this method does not provide an adequate degree of treatment. Therefore, in this case PLAZKAT systems are a more effective solution for removing aromatic hydrocarbon from the emissions.
By Plasma Air Systems Corporation based in Harju Maakond, ESTONIA.
Need help finding the right suppliers? Try XPRT Sourcing. Let the XPRTs do the work for you