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gas analysis filter Applications

  • Filtration for Flue Gas Analysis and CEMS

    Three Steps of CEMS: 1st Step: Gas Sampling 2nd Step: Gas conditioning and treatment 3rd Step: Measurement/Calibration In first step, the function is to get sample gas and forward to 2nd step for treatment. During this step, it cannot block the probes and cannot result condensation of moisture. So a filter online back flushing should be equipped in this part. The filters to be used: 1, Filter is used to ensure the stability of system and reduce the maintenance 2, Filtration Grade: usually 2 or 3 micron 3, Temp. is around 0-180 deg C 4, Back flushing gas is heated, impulse flushing 5, Filter Material: Titanium Sintered, SS316L Sintered, PTFE sintered, Ceramic Membrane and so on 2nd Step Gas Treatment: #11;The coarse filters and the liquid particle filters The coarse and fine cartridge can filter the small particles in the gas and acid aerosol things to better protect the instruments. The micron can be 0.1micron, filtration rate can be up to 99.99%, two layers can be 99.9999%

    By Shanghai CMI Environmental Technology Co.,Ltd. based in Shanghai , CHINA.

  • MBE Desposition Rate Monitoring and Control

    XBS Triple Filter Quadrupoles configured for multiple source monitoring in MBE deposition applications. The custom configured ioniser provides for high stability, high senstivity monitoring of oxides and metals from both k-cell and e-gun sources. MBE monitoring and control. Molecular Beam Studies. Multiple beam source analysis. High Performance RGA. Desorption / Outgassing studies / Bakeout cycles. Chamber / Process gas Contaminants. Hiden XBS mass spectrometers for high precision scientific, process applications and MBE analysis, featuring: High Sensitivity, Enhanced detection from 100% to 5ppb, mass range to 510 amu. Enhanced long-term Stability (less than ±0.5% height variation over 24 h). Crossbeam ion source, beam acceptance through +/- 35° to transverse axis. Ion source control for soft ionisation and appearance potential mass spectrometry. Enhanced sensitivity for high mass transmission,

    By Hiden Analytical based in Warrington, UNITED KINGDOM.

  • End Point Detection

    Hiden Ion Milling Probe – End Point Detector The only dedicated end point determination tool for ion etch control and optimum process quality. End point Analysis. Target Impurity Determination. Quality Control / SPC. Residual Gas Analysis. Leak Detection The IMP is a differentially pumped, ruggedized secondary ion mass spectrometer for the analysis of secondary ions and neutrals from the ion mill process, featuring: High Sensitivity SIMS / MS with Pulse Ion Counting Detector. Triple filter Quadrupole, 300 amu mass range is standard. Differentially Pumped Manifold With Mounting Flange to Process Chamber. Ion Optics with Energy Analyser and integral ioniser. Penning Gauge and interlocks to provide over pressure protection. Data System with integration to the process tool. Stability (less than ±0.5% height variation over 24 h). MASsoft control via RS232, RS485 or Ethernet LAN. Programmable DDE, Parallel Digital I / O, RS232 Scripting Communication

    By Hiden Analytical based in Warrington, UNITED KINGDOM.

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