In the semiconductor manufacturing industry, various perfluorinated compounds (PFCs) are used. The emissions of the PFC compounds into the ambient air are reduced by scrubbing of the exhaust gases from the process. In this process, the Gasmet™ FTIR Gas Analyzers can be used to measure the emissions into the atmosphere and also monitor the efficiency of the scrubbers. Typically monitored PFCs in the exhaust gas include carbon tetrafluoride CF4, trifluoromethane CHF3, and hexafluoroethane C2F6.
By Gasmet Technologies Oy based in Helsinki, FINLAND.
Supplying for over 35 years reliable air pollution control equipment and systems for removal of all gaseous compounds, particulate and odors from chemical process operations, reactors, dryers, calciners, membrane cells, pharmaceutical reactors and tablet dryers, crystallizers, vessel filling and storage vent emissions, emergency scrubbing of high concentration gas releases from cylinders, vacuum pump emissions, Quench /scrubber systems for acid gases and particulate from high temperature thermal oxidizers....
By Bionomic Industries Inc. based in Mahwah, NEW JERSEY (USA).
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