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integrated gas detection system Applications

  • End Point Detection

    Hiden Ion Milling Probe – End Point Detector The only dedicated end point determination tool for ion etch control and optimum process quality. End point Analysis. Target Impurity Determination. Quality Control / SPC. Residual Gas Analysis. Leak Detection The IMP is a differentially pumped, ruggedized secondary ion mass spectrometer for the analysis of secondary ions and neutrals from the ion mill process, featuring: High Sensitivity SIMS / MS with Pulse Ion Counting Detector. Triple filter Quadrupole, 300 amu mass range is standard. Differentially Pumped Manifold With Mounting Flange to Process Chamber. Ion Optics with Energy Analyser and integral ioniser. Penning Gauge and interlocks to provide over pressure protection. Data System with integration to the process tool. Stability (less than ±0.5% height variation over 24 h). MASsoft control via RS232, RS485 or Ethernet LAN. Programmable DDE, Parallel Digital I / O, RS232 Scripting Communication

    By Hiden Analytical based in Warrington, UNITED KINGDOM.

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    SF6 Leak Detection

    Monitoring Sulfur Hexafluoride (SF6) in the Power Utility Industry. Monitoring Sulfur Hexafluoride in the Power Utility Industry The SF6 Leak Detector 3434i from LumaSense offers an unmatched combination of performance and convenience. Based on the company’s Photoacoustic Spectroscopy (PAS) technology, the system offers highly accurate, reliable and stable quantitative gas analysis and detection. The growing environmental requirements and pressures regarding the use of SF6 make LumaSense’s system a coveted tool designed for everyday use. The system is able to measure the total concentration of the SF6 gas in an enclosed area, where the switchgear (or other SF6 filled equipment) is tested. Although only the total amount leaked is required by today’s standards, it is also advantageous to be able to pin point the leaks. This makes it easier to improve the integrity of the equipment. The SF6 Leak Detector system meets all of requirements for confined area such as substation Monitoring.

    By LumaSense Technologies, Inc. based in Santa Clara, CALIFORNIA (USA).

  • Integrated real-time gas analysis solution for chemical decontamination industry

    The threat of terror in the form of chemical and biological warfare agents has been a reality globally since March 1995, when the Aum Shinrikyo sect killed 12 people and injured nearly 6,000 by releasing sarin nerve gas in the Tokyo subway system. More recently, the 2001 anthrax attacks in the USA was a wake-up call that the threat is real. Recent outbreaks of H1N1 and SARS posed threats of worldwide epidemics because air travel provides a means for these diseases to spread globally in less than 24 hours. A major concern of several US government agencies, such as the Department of Defense, Homeland Security, and the Centers for Disease Control and Prevention is not only the detection of hazardous chemical and biological warfare agents (CBWA) or bacteria or viruses that pose an epidemic threat, but the timely decontamination of those agents to a level where they no longer pose a threat to human health and life. The solution requires a means to monitor the effectiveness of the decontaminating reactant or reactants to an endpoint that has been reliably shown to be more than 99% effective in rendering the targeted agents harmless under controlled conditions.

    By CIC Photonics, Inc. based in Albuquerque, NEW MEXICO (USA).

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