off-gas scrubber Applications
The consumption of scrubbing material in a scrubber is related to the mass flow of acid gases. Hydrogen chloride (HCl) and sulphur dioxide (SO2) are the major acid gases in an incinerator. By measuring the mass flow of SO2 and HCl in the raw gas going into the scrubber, it is possible to calculate the required quantity of scrubbing material.
By Opsis AB based in Furulund, SWEDEN.
In the semiconductor manufacturing industry, various perfluorinated compounds (PFCs) are used. The emissions of the PFC compounds into the ambient air are reduced by scrubbing of the exhaust gases from the process. In this process, the Gasmet™ FTIR Gas Analyzers can be used to measure the emissions into the atmosphere and also monitor the efficiency of the scrubbers. Typically monitored PFCs in the exhaust gas include carbon tetrafluoride CF4, trifluoromethane CHF3, and hexafluoroethane C2F6.
By Gasmet Technologies Oy based in Helsinki, FINLAND.
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