In the early 1990s no appropriate and comprehensive technical solution had been available for waste gas treatment in the semiconductor industry. Back then as well as today many industrial and research production procedures use process gases and generate waste gases. These waste gases, considered greenhouse gases, are toxic and/or highly flammable and very often pose a significant risk to production facilities and the environment. The semiconductor industry, for instance, uses perfluorocarbons, whose global warming potential is extremely high and therefore requires an efficient waste gas treatment. Combining and transporting different gases into a fab’s central waste gas system might produce highly flammable and highly explosive gaseous mixtures, which in the past has occasionally caused the total loss of entire production facilities. Particles contained within gases may also cause exhaust blockages. To eliminate these risks, process waste gases need to be treated at the “Point-of-Use” (POU) where harmful exhausts are abated immediately.
By DAS Environmental Expert GmbH based in Dresden, GERMANY.
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