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triple quadrupole mass spectrometer Applications

  • MBE Desposition Rate Monitoring and Control

    XBS Triple Filter Quadrupoles configured for multiple source monitoring in MBE deposition applications. The custom configured ioniser provides for high stability, high senstivity monitoring of oxides and metals from both k-cell and e-gun sources. MBE monitoring and control. Molecular Beam Studies. Multiple beam source analysis. High Performance RGA. Desorption / Outgassing studies / Bakeout cycles. Chamber / Process gas Contaminants. Hiden XBS mass spectrometers for high precision scientific, process applications and MBE analysis, featuring: High Sensitivity, Enhanced detection from 100% to 5ppb, mass range to 510 amu. Enhanced long-term Stability (less than ±0.5% height variation over 24 h). Crossbeam ion source, beam acceptance through +/- 35° to transverse axis. Ion source control for soft ionisation and appearance potential mass spectrometry. Enhanced sensitivity for high mass transmission,

    By Hiden Analytical based in Warrington, UNITED KINGDOM.

  • End Point Detection

    Hiden Ion Milling Probe – End Point Detector The only dedicated end point determination tool for ion etch control and optimum process quality. End point Analysis. Target Impurity Determination. Quality Control / SPC. Residual Gas Analysis. Leak Detection The IMP is a differentially pumped, ruggedized secondary ion mass spectrometer for the analysis of secondary ions and neutrals from the ion mill process, featuring: High Sensitivity SIMS / MS with Pulse Ion Counting Detector. Triple filter Quadrupole, 300 amu mass range is standard. Differentially Pumped Manifold With Mounting Flange to Process Chamber. Ion Optics with Energy Analyser and integral ioniser. Penning Gauge and interlocks to provide over pressure protection. Data System with integration to the process tool. Stability (less than ±0.5% height variation over 24 h). MASsoft control via RS232, RS485 or Ethernet LAN. Programmable DDE, Parallel Digital I / O, RS232 Scripting Communication

    By Hiden Analytical based in Warrington, UNITED KINGDOM.

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