Very large waste gas volumes with low contaminant concentration - Electronics and Computers
The electronic industry produces semiconductors that generate very large waste gas streams that are only slightly contaminated. These waste gas streams are purified in rotary adsorbers. The continuous regeneration of the adsorbers generates highly contaminated but much lower waste gas volumes that can be purified in a regenerative thermal oxidizer (RTO). The excess heat resulting from the contaminant purification is used for a pre-heating of the desorption air. The rotary adsorbers have a special desorption air recirculation device that allows for a much higher concentration factor, while reducing the operating costs.