Particle Measuring Systems

Airborne particle measurements: 100 LPM vs. 1 CFM particle counters in a semiconductor cleanroom environment

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Courtesy of Particle Measuring Systems

Abstract

Many current standards define airborne particle monitoring in units of particles-per-cubic-meter (particles/m3). Often, these standards require sampling an entire cubic meter (1 m3) to provide an accurate measurement of airborne particulate levels. Using a conventional aerosol particle counter that samples 1-cubic-foot per minute (1 CFM) requires more than 35 minutes to sample 1 m3. Newer particle counters are now available with 100 liter-per-minute (100 LPM) sampling rates. This application note discusses the benefits of sampling at higher flow rates.

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