Applied Materials - Process water and wastewater treatment for the solar industry - Case Study
One of the leading companies for specialised systems and manufacturing processes for semiconductors, electrical and solar technology operates a technology centre for vacuum technology for its solar division in Lower Franconia, Germany. A state of the art production facility for thin film technology was built at this location. This process requires ultra-pure water for the washing and cleaning processes. Wastewater from the etching processes and the exhaust air scrubbers is generated during the individual process stages. EnviroChemie provides a complete solution for water and wastewater treatment.
Water treatment
Municipal water is used to produce the demineralised water. The water treatment plant consists of a water softener, a reverse osmosis plant, and a polisher in two circulating systems. The system is pre-assembled on a rack and has the capacity to produce 2 x 1,000 l/h of ultra-pure water.
Technical specifications
- Output: 2 x 1,000 l/h
- Conductivity: 0.1 µS/cm
- pH value: 7
- Temperature: max. 50°C
Wastewater treatment
The wastewater to be treated is predominantly contaminated with hydrofluoric acid and hydrochloric acid. An Envochem® plant is used to treat the wastewater with physico-chemical processes and to dewater the resulting sludge. The treated effluent meets the requirements of the local authority wastewater statutes. The concept offers a high measure of safety, guaranteed by the double-walled construction of the wastewater piping and tanks. EnviroChemie supplied the entire pipework, from the wastewater sources to the site of the wastewater treatment.
Technical specifications
- 4 – max. 5 m³/day
- HF:Output: max. 3,000 mg/l
- pH value: 0–3
- Other impurities: ZnO and SiO2
- Limit values
- F: 50 mg/l
- pH value: 6.5-9.5
Both the water treatment plant and the wastewater treatment plant were pre-assembled and delivered ready for connection.
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