Characterizing Outgassed Organic Compounds
IEST-RP-CC031.2: Method for Characterizing Outgassed Organic Compounds from Cleanroom Materials and Components is relevant for any industry that may experience adverse production yields as a result of gaseous organic contamination, also known as volatile organic compounds (VOCs) and semivolatile organic compounds (SVOCs). In the semiconductor industry, for example, the deposition of outgassed compounds on hardware, products, and wafer surfaces can cause processing problems and hardware failures. In aerospace, molecular contamination can significantly
degrade spacecraft performance goals.
This RP describes a test method for semiquantitative determination and qualitative characterization of outgassed organic compounds. The RP specifies four outgassing temperatures—50 °C (122 °F), 75 °C (167 °F), 100 °C (212 °F), and 150 °C (302 °F)—to baseline cleanroom materials and components.