ftir gas meter Articles

  • IRGAS XFlo: process gas FTIR system for flange mounted applications

    Introduction When doing process tool or exhaust abatement tool installations, it is desirable to monitor the exhaust gases as a means of controlling or setting up the tool 1, 2. FTIR, with its rapid analysis speed, high sensitivity, and ease of use, offers one means of monitoring such systems at the time of installation and during the working life of the tool. Often, these applications ...


    By CIC Photonics, Inc.

  • Comparing TGA, FTIR and fixed filter infrared analyzers for measuring soot levels in in-service lubricants

    Measuring soot in diesel engine oil has become more important as soot levels get higher due to exhaust gas recirculation. As soot isone of the key indicators for the condition of the oil, diesel engine maintenance programs performing regular soot checks can realize cost savings by extending drain periods and reducing used oil disposal. TGA (Thermal Gravimetric Analysis) is the traditional method ...


    By Spectro Scientific

  • Detection of moisture in ammonia gas

    Problem Statement As technologies advance, so does the request for ultra high purity ammonia. Ultra high purity (UHP) ammonia is used in the semiconductor industries, production of flat panel displays, and a number of other applications. Due to this rising interest in UHP ammonia, manufacturers are having to battle ammonia’s most prominent and damaging impurity--moisture. For ...


    By CIC Photonics, Inc.

  • Wastewater Treatment Plant Monitors Greenhouse Gas Emissions

    Globally, little attention is paid to gaseous emissions from wastewater treatment processes. This contrasts greatly with the regulatory monitoring that is applied to the quality of water emissions from such facilities. However, in Helsinki, Finland, a large municipal wastewater treatment facility continuously monitors its emissions of greenhouse gases (GHGs) to help in the city’s efforts to ...


    By Gasmet Technologies Oy

  • Leak detection in semiconductor fab gas processes

    Problem Statement Often times in semiconductor fabs moisture levels are monitored to ensure that products aren’t damaged by excess moisture in the process. If there are above normal levels of moisture, pinpointing the source of that moisture can be difficult. The moisture could be evolving from impurities in gas tanks or leaks in the sampling lines. One way to avoid downtime ...


    By CIC Photonics, Inc.

  • Monitoring the performance of moisture purifiers for process gases

    Problem Statement Moisture purifiers are a big aid in keeping moisture levels under control inside a process chamber. They are provided by manufacturers with certain life expectancies, which vary depending on the moisture content of the gas being purified. As a result, it is difficult to determine which gases have a high moisture content and which moisture purifier is becoming ...


    By CIC Photonics, Inc.

  • Detection of early PFA seals (perfluoroalk-oxyethylene) degradation exposed to process gases inside a reactor chamber

    Problem Statement Replacement of PFA seals inside the reactor chamber is performed according scheduled maintenance and life expectancy of the seals. Early degradation of seals goes completely undetected until there is a complete failure of the seal, letting atmospheric contaminants inside the reactor and forcing an unscheduled reactor downtime. IRGAS ...


    By CIC Photonics, Inc.

  • Continuous monitoring of moisture present inside a process chamber

    Problem Statement Moisture inside a process chamber is a big silent killer during wafer production. When production yield goes down, it is hard to pinpoint the source of the problem. Most of the time wafers need to be sent to labs for analysis, while production is stopped. If the problem is related to a high level of moisture inside the reactor, there are several factors that can cause ...


    By CIC Photonics, Inc.

  • Detection and measurement of toxic gases from destructive testing of batteries

    Problem Statement New formulations of organic-compound-based batteries for vehicle use must be tested for release of potentially harmful and toxic gases if crushed in accidents. Potential gases include hydrocarbons, fluorocarbons, and hydrogen fluoride, released within seconds of an incident. Actual time-resolved and quantitative data are required from destructive testing to ascertain ...


    By CIC Photonics, Inc.

  • Measurement of moisture in HBr

    Introduction Moisture in corrosive gases will accelerate the rate of metal corrosion in gas supply systems which, in turn, can lead to their premature failure. For this reason, it is important to monitor moisture levels in these gases. FTIR is an effective way to monitor for moisture in these corrosive gases. In order to determine low levels of moisture in corrosive gases, it is ...


    By CIC Photonics, Inc.

  • A novel spectrometer design for process and handheld infrared spectral measurements

    Introduction Infrared spectroscopy offers many unique advantages for measurements within an industrial environment. Historically, the technique has been used for a broad range of applications from the composition of gas and liquid mixtures to the analysis of trace components for gas purity analysis. In cases where a well-defined method of analysis is involved, such as the measurement of ...


    By CIC Photonics, Inc.

Need help finding the right suppliers? Try XPRT Sourcing. Let the XPRTs do the work for you