single quadrupole gas chromatograph mass spectrometer Articles

  • Development of on-line and field dual TD GC – MS for automatic VOC monitoring on petrochemical sites

    Ambient air is polluted by many semi-Volatile and Volatile Organic Compounds (SVOCs and VOCs) coming from anthropogenic and natural sources. VOCs from PAMS, TO14 and TO15 lists can be measured in many ranges of concentration, from pg/m3 up to mg/m3 depending on the location of the measurements. Due to the large number of molecules, the complete separation of all compounds is difficult to perform ...

    By Chromatotec Group

  • Detection and measurement of GWGs in semiconductor fab facilities

    Problem Statement Various processes and tools in the modern wafer fab plant produce effluent streams that contain unacceptably high levels of perfluorocarbon GWGs (greenhouse warming gases). These effluent streams are abated by plasma incineration and wet scrubbers and other techniques. It is necessary to measure the destruction removal efficiency (DRE) of the various abatement methods ...

    By CIC Photonics, Inc.

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