single quadrupole gas chromatograph mass spectrometer Articles

  • Detection and measurement of GWGs in semiconductor fab facilities

    Problem Statement Various processes and tools in the modern wafer fab plant produce effluent streams that contain unacceptably high levels of perfluorocarbon GWGs (greenhouse warming gases). These effluent streams are abated by plasma incineration and wet scrubbers and other techniques. It is necessary to measure the destruction removal efficiency (DRE) of the various abatement methods ...

    By CIC Photonics, Inc.

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