Inderscience Publishers

Nanomanufacturing of carbon nanotubes on titanium nitride

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Carbon nanotubes (CNTs), in particular the vertically-aligned variety grown through a PECVD-based process, are highly versatile nanostructures that can be used in a variety of nanomanufacturing applications. However, process and material compatibility issues have prevented the nanotubes from becoming more fully integrated into various micro- and nanomanufacturing applications. In this paper, we discuss the use of a folding titanium nitride membrane layer to more easily combine the nanotube growth process with other nanomanufacturing schemes, such as Nanostructured OrigamiTM (In et al., 2006).

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