Inderscience Publishers

Nanomanufacturing of carbon nanotubes on titanium nitride


Carbon nanotubes (CNTs), in particular the vertically-aligned variety grown through a PECVD-based process, are highly versatile nanostructures that can be used in a variety of nanomanufacturing applications. However, process and material compatibility issues have prevented the nanotubes from becoming more fully integrated into various micro- and nanomanufacturing applications. In this paper, we discuss the use of a folding titanium nitride membrane layer to more easily combine the nanotube growth process with other nanomanufacturing schemes, such as Nanostructured OrigamiTM (In et al., 2006).

Customer comments

No comments were found for Nanomanufacturing of carbon nanotubes on titanium nitride. Be the first to comment!