To understand the mass transfer behaviors in hollow fiber membrane contactors, ozone fluxes affected by various conditions and membranes were investigated. For physical absorption, mass transfer rate increased with liquid velocity and the ozone concentration in the gas. Gas flow rate was little affected when the velocity was larger than the critical value, which was 6.1 × 10−3m/s in this study. For chemical absorption, the flux was determined by the reaction rate between ozone and the absorbent. Therefore, concentration, species, and pH affected the mass transfer process markedly. For different absorbents, the order of mass transfer rate was the same as the reaction rate constant, which was phenol, sodium nitrite, hydrogen peroxide, and oxalate. Five hydrophobic membranes with various properties were employed and the mass transfer behavior can be described by the Graetz–Lévèque equation for the physical absorption process. The results showed the process was controlled by liquid film and the gas phase conditions, and membrane properties did not affect the ozone flux. For the chemical absorption, gas film, membrane and liquid film affected the mass transfer together, and none of them were negligible.