High-g is an acceleration value larger than 105 g. For the requirements of detecting high-g, people pay more and more attention to the reliability of an accelerometer. In this paper, the design and manufacture of high-g micro array acceleration sensor are researched to improve the reliability of the accelerometer. Owing to the superiority of MEMS manufacturing, in one processing, multiple micro-acceleration sensors with the same function can be integrated in one chip. According to the method of the array layout of multiple micro-acceleration sensors on a two-dimensional plane, the layout is ascertained by using multiple non-linear regression and orthogonal experimental design. Multiple micro-acceleration sensors lay reasonably to improve the reliability of the high-g micro array acceleration sensor. The linked line of sensor system, which is manufactured according to these parameters, remains intact by the impact of 1.22 × 105 g. Owing to the optimised design and manufacture, the reliability of the acceleration is increased to 0.9906, which meets the requirements of the application.
- Inderscience Publishers
- Research of reliability for measuring high-g micro array ...
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