SIMS depth profile analysis of WC-Co composite used in wood materials machining after nitrogen ion implantation
Abstract: SIMS depth profile analysis of WC-Co composites used in wood materials machining after nitrogen ion implantation. The paper presents the analysis of depth profiles WC-Co samples obtained using the SIMS method. The surface of samples was modified in the process of nitrogen ions implantation. Secondary ion mass spectrometry (SIMS) is a very useful technique for the analysis of layered systems. It is based on the primary ion beam sputtering of solids and mass analysis of the emitted secondary ions. The results show a high correspondence between the nitrogen depth profiles obtained in the SUSPRE modeling and in the SIMS experiment.
Keywords: Secondary ion mass spectrometry (SIMS), depth profile analysis, WC-Co composites, nitrogen ion implantation, machining, wood materials