Inderscience Publishers

Stress effects on solid–state dewetting of nano–thin films

In this paper, we present a brief survey of stress effects on dewetting. For this purpose, i) we develop a simple thermodynamic model to illustrate stress effects; ii) we study stress effects in strained–Silicon–On–Insulator (s–SOI) thin films by means of Low Energy Electron Microscopy, and Atomic Force Microscopy; iii) we discuss some available data. In particular, we show that while for s–SOI the strain only provides a relatively small contribution to the total driving force for dewetting, in some other cases stress can really dominate the driving force for the dewetting.

Keywords: solid–state dewetting, nanothin films, strain, stress, SOI, thin films, nanotechnology, silicon–on–insulator

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