Micromega Dynamics SA

Usb Accelerometer sensor for vibration analysis in semiconductor industry inspection machines - Case Study

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Courtesy of Micromega Dynamics SA

Problem description:

Micromega Recovib.Feel® USB vibration recorder and the operator smartphone can be very helpful in special environment such as clean room because of their easy use. Indeed, inspection machines for the semiconductor industry experience more and more stringent precision requirements while being required to go faster to increase the production rate. With that respect it is necessary that the machine dynamics exhibits specified structural characteristics (resonance frequency, structural damping…) that depends on the machine design but also on the machine boundary conditions.

These characteristics can be obtained with dedicated professional setup, such as accelerometers, sensor, conditioning units and a dynamic signal analyzer. However, their use in a clean room environment can be clumsy (sensor mounting, cabling…). In a recent mission, it was proposed to use the Micromega Recovib.Feel® USB recorder and the related vibration analysis app to characterize the machine dynamics. The sensor, equipped with magnets, is easily installed on the machine and connected either to a smartphone or a PC.

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