Croll-Reynolds Company, Inc.

Wet Scrubbing HCL & SiCl4 Fumes

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Courtesy of Croll-Reynolds Company, Inc.

This two-stage scrubbing system utilizes a jet venturi scrubber in conjunction with a counter current packed tower including entrainment mist eliminator. It was designed to eliminate the HC1 (hydrochloric acid) fumes generated when S1C14 (silicon tetrachioride) comes in contact with moisture cluring processing operations at a zirconium processing tank farrn, and also the remaining smail amount of SiC14 in the gas stream.

The Jet Venturi works on the principie of a vacuum ejector entraining the contaminated gas stream via the use of the scrubbing liquid for the motive force without the use of a mechanical gas mover. This minimizes maintenance and related downtime as well as employee contact with hazardous fumes.The motivating fluid enters the scrubber through an injector-type nozzle producing a hollow cone narrow spray pattern, creating suction that draws the gases and vapors into the system and generating the slight pressure necessary to “push” the gases througii the packed tower.The jet ven- tun removes the bulk of the HC1 gas and the remaining SiCI4.The packed tower “polishes” the upward flowing gas as downward llowing aqueous sodium hydroxide intimately contacts the gas on the extensive surface area of the packed bed.

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