Semiconductor Industry: Wafer Fab Exhaust Management
Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given application.
- Authors / Editors:
- Sherer and J. Michael
- Price:
- $144,95, £79,99
- Print ISSN:
- 978-1-57444-720-0
- Launch:
- Jun. 2005
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