Accurion GmbH

Accurion GmbH

Accurion provides high-end and reliable state-of-the-art technology in two product lines: Imaging Ellipsometry and Active Vibration Isolation. In 2009, Halcyonics GmbH, specialist for Active Vibration Isolation Solutions and Nanofilm Technology GmbH, expert for surface analyzing tools merge to Accurion GmbH. Both divisions are well-established and look back on a long-term experience in developing and producing scientific instruments. Nanofilm has been the leader in Brewster Angle Microscopy and Imaging Ellipsometry since 1991. Halcyonics was founded in 1996 as specialist in Active Vibration Isolation. The existing product brands Nanofilm and Halcyonics are continued as product divisions of Accurion. Accurion introduces the first scanner free fully focusing Brewster Angle Microscope worldwide.

Company details

Stresemannstrasse 30 , Goettingen , 37079 Germany
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Business Type:
Industry Type:
Noise and Vibration
Market Focus:
Globally (various continents)


Foundation of Nanofilm Technology GmbH as a spin-off of the Max-Planck-Institute (MPI) for biophysical chemistry in Goettingen, Germany

First product: Nanofilm’s „Brewster Angle Microscope BAM1“


Foundation of Halcyonics GmbH as a spin-off of Nanofilm Technologie GmbH as the specialist for Active Vibration Isolation


Introduction of the worldwide first Imaging Ellipsometer Nanofilm’s “I-Elli2000“


Foundation of „Accurion Inc.“ in the Silicon Valley (USA) as a sales office for North America.


Halcyonics establishs its own production and  starts continuous redevelopment in technology and product design to fit customer needs. 

Introduction of Nanofilm´s first Reflection Spectrometer (RefSPEC)


Introduction of Nanofilm’s new „Imaging Ellipsometer platform EP³“


Introduction of Nanofilm’s Imaging Ellipsometer EP³SPR for biotechnology applications


Introduction of the worldwide first „Spectroscopic Imaging Ellipsometer EP³SE“ by Nanofilm

Introduction of Halcyonics' Vario system


Introduction of Halcyonics' Micro system.


Introduction of Halcyonics Silencer and Workstations based on Micro and Vario technology


Nanofilm becomes a Division of Halcyonics GmbH

Introduction of the worlds smallest active vibration isolation system Halcyonics Nano 20.


Halcyonics and Nanofilm Announce Union under the name Accurion and move to a new facility at Stresemannstr. 30, 37079 Goettingen, Germany.

Introduction of Halcyonics i4 system.


Accurion introduces the first scanner free fully focusing Brewster Angle Microscope worldwide, the nanofilm_ultrabam


Introduction of Workstation with integrated halcyonics_i4 system 


Introduction of nanofilm_ep4


Introduction of nanofilm_RSE


Introduction of IVF-Workstation