HORIBA Europe GmbH

1 products found

HORIBA Europe GmbH Products

  • Semiconductor

  • HORIBA - Model LU-A1000 Series - Liquid Auto Refill System

    HORIBA - Model LU-A1000 Series - Liquid Auto Refill System

    The LU Series can offer uninterrupted, safe and reliable delivery of the liquid precursor to liquid material baking systems and injection systems, increasing uptime and reducing operator handling and risk of process contamination. Includes a function for automatically implementing a remaining liquid purge sequence. Maintenance efficiency and product throughput have also been improved with the LU Series.