LumaSense Technologies, Inc., An Advanced Energy Company

5 products found

LumaSense Technologies, Inc., An Advanced Energy Company Products

  • Plasma Power Generators - RF Plasma Generators

  • Apex - RF Power-Delivery Systems

    Apex - RF Power-Delivery Systems

    High-Power Density for Compact Installation. When space is limited, but performance is critical, streamlined APEX RF generators offer various mounting options and power you can rely on.

  • HiLight - RF Power-Delivery Systems

    HiLight - RF Power-Delivery Systems

    A Compact, Economical, Easy to Install, Low Power RF Platform. Compact, lightweight, and air-cooled, HiLight™ RF generators are ideal for low-power, on-board applications, suiting 13.56 MHz plasma and 1 or 2 MHz processes.

  • Model LFGS - Mid-Frequency Generator Tailored for Plasma Processing

    Model LFGS - Mid-Frequency Generator Tailored for Plasma Processing

    The versatile, variable-frequency LFGS generator (1250 W, 40 to 500 kHz) suits a wide variety of semiconductor and general plasma-processing applications, including sputtering, reactive ion etching, plasma deposition, polymerization, and surface treatment. Its compact 19', rack-mountable, air-cooled package eases installation and saves valuable space. With a half-bridge, class-D...

  • Model PDX - RF Plasma Generators

    Model PDX - RF Plasma Generators

    Need a highly efficient, compact, easy-to-integrate power source? The PDX® series provides extremely accurate, highly repeatable process control, helping to ensure process uniformity and high throughput. It’s wide frequency range of operation delivers optimal control across numerous applications. The PDX low-power (LP) series is available in 1250 W and 1400 W versions and the PDX high-power (HP) series is available in 5000...