171 Articles found
Particle Measuring Systems (PMS) Articles
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Testing of the Airnet II 510XR Particle Sensor for Use in VHP Applications
Abstract The increasing use of Vaporized Hydrogen Peroxide (VHP) as a sterilizing gas in pharmaceutical manufacturing isolators can cause premature failure of particle counters exposed to those environments. Particle Measuring Systems’ Airnet ...
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Nanoparticle Monitoring in Ultra-Clean Manufacturing Environments
Abstract With its 10 nm sensitivity, the NPC10 NanoParticle Counter bridges the gap between conventional aerosol optical particle counting at 0.1 μm (100 nm) and sub-nm scale airborne molecular contamination. Experimental and field data ...
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OLED N2 Box Monitoring Solutions
Abstract The Flat Panel Display manufacturing industry is evolving rapidly with growth driven by mobile devices and resolution improvements. Most display manufacturers are investing in Organic Light Emitting Diode (OLED) technology which offers ...
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Airnet® OPC Set Up Guide
Abstract Airnet® OPC provides data via an OPC Server. The server supports OPC Data Access Custom Interface Standard 2.05a. Information on the OPC specifications and standards can be found at http://www.opcfoundation.org/. These specifications ...
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Particle Counters and PoE
Abstract Connecting instruments and electronics to power outlets can be challenging—especially in remote locations where an outlet is not easily reached. A technology that is quickly expanding is Power over Ethernet (PoE) because it provides ...
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Sampling High-Pressure Gases
Abstract This paper describes fundamental relationships between air or gas volume, pressure, and flow, and how these relationships affect particle counting. Also, a simple plumbing technique is offered as an alternative method for occasionally ...
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Improved Particle Counting Accuracy in Manifold Monitoring
Abstract Many particle counter users are unaware that – during traditional manifold sampling – the monitor undercounts the ambient particle concentration. Because of the additional vacuum created by the manifold pump, the particle ...
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Monitoring of ultrapure water (UPW) systems using the Ultra DI® 20 Liquid Particle Counter
Abstract Through continuous process and equipment advancements, semiconductor manufacturers are approaching 14 nm feature sizes and heading even smaller, while hard-disk drive fly heights are now less than 10 nm. This ever-reducing device feature ...
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New Particle Monitoring Strategies in UPW for 300 mm Fabs
Abstract Process failures caused by particles in Ultra Pure Water (UPW) are relatively infrequent events, but with the move to 300 mm wafers and 90 nm line widths, they can have significant financial impact. Most particle monitoring strategies in ...
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Statistics of Particle Counting in Ultrapure Water
Abstract State of the art ultrapure water systems are now so clean that quantifying the particle concentrations is difficult. When measuring the cleanliness of the water the scarcity of particles can lead to statistical variations that can be as ...
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NanoVision Technology Enables Particle Monitoring of High Molecular Scatter Chemistries
Abstract Semiconductor manufacturing utilizes ultra-pure chemistries which frequently have significant molecular scatter. This high molecular scatter reduces the signal-to-noise efficiency of older particle metrology technology and in some cases ...
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Best Known Method for Clean Fluid Sampling to Get Consistent Measurements During Offline Particle Analysis
Abstract A complete chemical quality monitoring program includes data gathered from the time chemicals are received all the way to the point of process. Throughout this monitoring program, the best known method (BKM) which provides optimal data ...
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NanoVision Technology Liquid Optical Particle Counters Enter the Digital Age
Abstract There are many industries that use Optical Particle Counters (OPC) to monitor particle contamination in liquids. While liquid OPCs have evolved with time they have employed the same general light-scattering design principles. Now, ...
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Optical Particle Counter Verification of Particle Concentrations in Filtered Seawater for Injection into Oil Reserves
Abstract Seawater injection is a secondary recovery technique used in oil reservoirs to replace extracted oil and maintain well pressure. Oil reservoirs are typically found within the small pores of sedimentary rock formations, so it is imperative ...
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Optical Particle Counter Verification of Particle Concentrations in Filtered Seawater for Injection into Oil Reserves
Abstract High particle levels in process chemicals have been shown to directly affect product quality. The need for continued reductions in particle size and quantity in cleanroom environments is well established. The International Technology ...
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LiQuilaz® S05 Thermal Test
Abstract Optical particle counters such as the LiQuilaz® II S05 from Particle Measuring Systems are used in a variety of environments that may experience fluctuations in ambient temperature. An additional temperature effect comes from the ...
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LiQuilaz® Particle Counter Maintenance: Capillary Cleaning Procedures
Abstract For optimal performance of a liquid particle counter occasional cleaning of the liquid capillary is required. Multiple methods can be used to achieve better cleanliness. This is a basic instruction guide for multiple cleaning methods for ...
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Monitoring Particles in Process Chemicals
Abstract High particle levels in process chemicals have been shown to directly affect product quality. The need for continued reductions in particle size and quantity in cleanroom environments is well established. The International Technology ...
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Monitoring Precision Parts Cleaning
Abstract Continued miniaturization of high technology products in a wide range of industries has resulted in the increased need for cleaner parts. Continuous particle monitoring utilizing a wide range of sampling techniques is capable of meeting ...
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Statistical Analysis: Liquid-Borne Particles
Abstract The impact of statistics on choosing and using a liquid particle counter is reviewed. The statistical techniques used with liquid particle counters are well known and relatively simple, but the simultaneous impact of both sample volume and ...