Hiden Analytical Ltd.

Mass Spectrometers for Thin Films, Plasma and Surface Engineering 1120/02

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Surface characteristics of parylene-C films in an inductively coupled O2/CF4 gas plasma. Project Summary by: Dr Yong-Hyun Ham and Professor Kwang-Ho Kwon, Korea University, Korea O- density measurements in the pulsed-DC reactive magnetron sputtering of titanium. Project Summary by: Professor James Bradley, University of Liverpool, UK Metal-carbon composites and multilayer thin films prepared by plasma assisted sequential deposition. Project Summary by: Ph.D Tomy Acsente, National Institute for Lasers, Plasma and Radiation Physics, Romania Hiden ESPion plasma probe measurements on a hollow-cathode based large-volume plasma source. Project Summary by: Burkhard Zimmermann, Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP, Germany

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