Monitoring and Testing Equipment with Air quality and industrial gas monitoring systems for Semiconductor applications

The OG-5000 series of ozone generators is designed to produce high concentrations of ultra clean ozone gas for use in semiconductor applications including CVD, ALD thin film, oxide growth and wet bench cleaning processes. The OG-5000 series has a compact, water cooled design that can be easily integrated with Teledyne API's ozone system ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Ozone Generators & Controllers Product line

The Model T108 Total Sulfur analyzer is designed to measure mixed sulfur impurities, collectively referred to as Total Sulfides, in air or carbon dioxide gas. Since there is no scrubber in the system, the instrument reading is the sum of the oxidized sulfur compounds and SO2.

By Teledyne API based in San Diego, CALIFORNIA (USA). from Sulfur Compound Instruments Product line

The Model 470 is a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in deionized water or sulfuric baths with concentrations above 150 mg/L. The Model 470 is “clean-ready” for high purity ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Dissolved Ozone Instruments Product line

The Mini ODS is a compact, integrated ozone delivery system designed to produce ozone concentrations of 21% w/w, 320g/Nm3 for a wide range of wafer processing applications. It is a very compact yet complete ozone delivery system, including: a high purity ozone generator, high concentration ozone monitor, microprocessor based controller, and all ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Ozone Generators & Controllers Product line

The OPTI-Sense series of sensors is based on Non-Dispersive Infrared (NDIR) technology. They are designed to precisely measure the absorbance in the infrared spectrum of specialty gases typically found in semiconductor applications. They are very compact and designed with no moving parts, making the OPTI-Sense robust and ideal for continuous ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Specialty Process Gas Monitors Product line

The Model 452 is a microprocessor based gas sensor for measuring high concentrations of ozone in oxygen or air with accuracy and dependability. The measurement principle is based on the absorption of UV light at 254nm. Readings are available in % by weight, or grams/Normal cubic meter. Temperature and pressure compensation up to 3 Bar Absolute is ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Process Ozone Instruments Product line

The Model T700 is a microprocessor based calibrator for precision gas analyzers.  Using highly accurate mass flow controllers combined with compressed sources of standard gases, calibration standards are provided for multipoint span and zero calibrations using up to 4 gas sources.

By Teledyne API based in San Diego, CALIFORNIA (USA). from Gas Calibrators & Zero Air Generators Product line

The Model T700U is a microprocessor based calibrator for precision, trace-level gas analyzers.  Using highly accurate mass flow controllers combined with compressed sources of standard gases, calibration standards are provided for multipoint span and zero checks using up to 4 gas sources.

By Teledyne API based in San Diego, CALIFORNIA (USA). from Gas Calibrators & Zero Air Generators Product line

The Model T102 TRS analyzer uses the proven UV fluorescence principle to measure Total Reduced Sulfur at levels commonly required for ambient air monitoring. The Model T102 uses a high temperature external converter set at 850°C to allow conversion of H2S, methyl mercaptan, dimethyldisulfide, and methyl-disulfide to SO2 at this temperature ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Sulfur Compound Instruments Product line

The SCI-552 is a system controller for ozone delivery systems that provides electronic control interfaces for a number of typical system components, including: ozone generators, EV valves, mass flow controllers, back-pressure controllers, Teledyne API 452 ozone sensors, Teledyne API 470 dissolved ozone sensors, and a water chiller. The SCI-552 ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Ozone Generators & Controllers Product line

The Model T201 combines a specially configured chemiluminescence analyzer with an external thermal converter to give stable and repeatable NH3 measurements at very low levels. In addition, the T201 provides simultaneous values for NO, NO2, and NOx concentrations. The T201 is ideal for trace ammonia monitoring applications in ambient air as well as ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Nitrogen Compound Instruments Product line

The Model T753U is a portable, microprocessor based precision Calibrator for Ozone gas instruments and sensors. Using a sophisticated Ozone generation system, combined with a sensitive photometer and pneumatic design, the T753U produces stable and reliable concentrations of Ozone in a convenient and rugged package based on our popular T750U ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Gas Calibrators & Zero Air Generators Product line

The AC series of ozone generators offers silent corona discharge technology in a very compact package. The ceramic-based, industrial grade ozone generators are capable of producing concentrations of ozone in excess of 200 g/Nm3 or 14% w/w. The AC series generators are available in a 19 inch rack-mount enclosure or a rugged, wall-mount enclosure ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Ozone Generators & Controllers Product line

The Model 465L UV Photometric Ozone Monitor is an extremely stable analyzer, ideal for critical low-level ppm safety and process applications. Its calibration is NIST traceable and the included pressure and temperature compensation ensure high accuracy under all conditions.

By Teledyne API based in San Diego, CALIFORNIA (USA). from Process Ozone Instruments Product line

The ODS series of High Concentration High Purity Ozone Gas Delivery Systems is designed for use in the most demanding semiconductor applications. This highly reliable ODS is ideal for applications requiring high concentration ozone at a wide range of flow rates. The ODS system is a complete turnkey solution that is custom configured to plug and ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Ozone Generators & Controllers Product line

The Model T703U is a microprocessor controlled ozone calibrator for precision gas analyzers.  Expanded ozone audit levels have created a need for precise ozone calibration well below the capabilities of standard calibrators.  The Model T703U is designed to meet the requirements of ultra-low ozone production.

By Teledyne API based in San Diego, CALIFORNIA (USA). from Gas Calibrators & Zero Air Generators Product line

The Model T101 H2S analyzer uses the proven UV fluorescence principle to measure hydrogen sulfide at levels commonly required for ambient air monitoring. The Model T101 is equipped with an internally mounted catalytic converter set at 315°C to convert H2S to SO2. A switching mode alternately measures H2S and SO2 while showing both readings ...

By Teledyne API based in San Diego, CALIFORNIA (USA). from Sulfur Compound Instruments Product line

The Model T640 PM Mass Monitor is the next breakthrough in ambient particulate monitors. The T640 delivers 1-min or better time resolution with exceptional sensitivity and precision. The instrument is very low maintenance and requires no sample media for minimal cost of operation.

By Teledyne API based in San Diego, CALIFORNIA (USA). from Particulate Instruments Product line

The Model T703 Photometric O3 calibrator combines an ozone generating device and photometer to provide a specified ozone concentration by volume for precision gas analyzers. The Model T703 can deliver concentrations from 50 ppb to 5 ppm at flows from 1 LPM to 5 LPM.

By Teledyne API based in San Diego, CALIFORNIA (USA). from Gas Calibrators & Zero Air Generators Product line