airborne particulate monitoring News

Dan Rodier, Ph.D., at SMC Korea 2019

Dr. Dan Rodier, Ph.D., Staff Scientist at Particle Measuring Systems (PMS) spoke at SMC Korea 2019, hosted by SEMI on May 16, 2019. His topic, Advanced Metrology for Measuring Contamination and Managing Risk in Semiconductor Manufacturing, was well received. In his talk, Dr. Rodier outlined data analysis techniques for assessing contamination in distribution systems, nanoparticle contamination ...

May 20, 2019

By Particle Measuring Systems (PMS)

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