AMETEK MOCON’s Baseline® 9100 Gas Analyzer performs the analysis of residual solvents in air—ethanol, isopropanol (IPA), and acetone—that are used in semiconductor cleanroom environments, i.e. solvent stations.
During semiconductor fabrication processes, volatile organic compounds (VOCs) are emitted primarily from diffusion and cleaning during wet-etching processes. The residual presence of these solvents can be detrimental to production yields and to worker health.
MOCON’s Baseline® 9100 Gas Analyzer combines the selectivity of gas chromatography with the sensitivity of a photo ionization detector (PID). The analysis provides an interference free response to ethanol (if desired), IPA, and acetone in air—no preconcentration necessary. Competitive analytical approaches that require preconcentration exhibit much longer analysis times, are much more costly, more complex, and suffer from poor reproducibility.
The solvents are detected and accurately quantified to sub-ppb levels in under 3 minutes with ethanol producing no interference. The instrument is sensitive to below 5 ppb for both IPA and acetone employing MOCON’s standard Baseline® PID, and < 0.1 ppb using MOCON’s high sensitivity Baseline® PID.
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About MOCON, Inc.
MOCON, Inc. manufactures the Baseline® product line of toxic gas monitoring systems, custom gas analyzers and detectors, and air quality testing equipment. MOCON is a leading provider of detectors, instruments, systems and consulting services to research laboratories, production facilities, and quality control and safety departments in the medical, pharmaceutical, food and beverage, packaging, environmental, oil and gas, and other industries worldwide. For more information about MOCON’s Baseline® gas analyzers and sensors, visit www.baseline-mocon.com.
About AMETEK, Inc.
Acquired in June 2017 by AMETEK, Inc., MOCON is now a unit of AMETEK Process & Analytical Instruments. AMETEK is a leading global manufacturer of electronic instruments and electromechanical devices with annual sales of $4.3 billion. More information is available at www.ametek.com.