Advanced Energy`s Luxtron four-channel m924 and two-channel m922 semiconductor modules are designed for etcher and wafer fab equipment temperature monitoring of electrostatic chucks, chambers, and other devices. Mix and match components. Works with current semiconductor Luxtron brand Fluoroptic probes and fiber optic extensions. Built-in calibration tables match to custom AE probes for high accuracy measurements. Accuracy of up to ±0.05°C is achievable (probe dependent).