The AMC-Monitor is a modular and flexible platform for Airborne Molecular Contaminations (AMC) monitoring in semiconductor applications such as: FOUP analysis with a focus on VOC and condensables incl. full integration with Pfeiffer Vacuum APA 302 pod analyzer. Clean-room monitoring in fabrication plants: automated detection of AMC at multiple sampling points with an integrated multiplexing system, directly in the fab at variable locations and even at the tool-level. Monitoring of outside and intake air: automated fence line monitoring incl. alarm levels, up- and downstream filter testing. |