The IST AG P14 2FW Thermo was designed especially for dew point applications and humidity generators. The favorable one-chip solution consists of a capacitive humidity sensor, based on the standard P14 sensor, together with a heating element, which, at the same time, works as a valid Pt100 sensor. The sensor achieves outstanding measurement accuracy due to the optimal thermal coupling which enables a fast recovery time. Due to heating from the Pt100, humidity is quickly released and enables fast re-measurements after condensation. Furthermore, the Pt100 sensor heats out gases or vapors from the polymer, which might cause a drift of the humidity signal.