Advanced Energy

- Model LUXTRON m920 Series - Semiconductor Module



Advanced Energy's Luxtron four-channel m924 and two-channel m922 semiconductor modules are designed for etcher and wafer fab equipment temperature monitoring of electrostatic chucks, chambers, and other devices. Mix and match components. Works with current semiconductor Luxtron brand Fluoroptic probes and fiber optic extensions. Built-in calibration tables match to custom AE probes for high accuracy measurements. Accuracy of up to ±0.05°C is achievable (probe dependent).

The complete Luxtron® m920 series OEM solution is built using the electronics module assembly with two boards plus probes. The main board contains fiber optic temperature sensing channels, digital output (RS232 ASCII and RS485 Modbus), and power connection. The analog output board provides 0 to 10 V or 4 to 20 mA output and is mounted above the main board. An optional metal enclosure is also available.

The m920 series system uses Fluoroptic® technology. The m920 series main board conditions the measurement signal from Fluoroptic probes and reports a calibrated temperature to the OEM control system.

  • Achieve high accuracy and a high temperature range for different etching and wafer fab processes
  • Monitor faster ramp conditions with a fast sample rate
  • Gain better temperature measurements with this low noise solution
  • Take advantage of high reliability for low failure rates
  • Receive support supports custom integration and probe designs world-wide

  • Two or four channels, expandable up to 64 with RS485 Modbus
  • Single PCB design with options for analog output and metal enclosure
  • Probes are immune to electomagnetic interference, such as high voltage, RF, plasma, and microwave
  • Backward compatible with Advanced Energy spring loaded and Accudisc probes
  • Custom probes available for semiconductor applications


  • Channels:
    • m922: 2
    • m924: 4
  • Temperature Range: -100 to 330°C (probe dependent)
  • Measurement Resolution: o.orc
  • Measurement Rate: Up to 50 Hz per channel
  • Accuracy: ±0.05°C (probe dependent)

Environmental Specifications:

  • Operating Temperature: -40 to 85°C
  • HxWxL: 23.7 x 100.6 x 134.4 mm (main board)
  • Housing: Metal enclosure for electromagnetic shielding (optional accessory)


  • Analog Output: 0 to 10V or 4 to 20 mA
  • Serial Output: RS232 and RS485
  • Protocol: ASCII and Modbus (RS485)


  • Input Power: +5 to 24 VDC nominal at 100 mA

Typical Applications

  • Plasma etch electrostatic chuck monitoring
  • Plasma shower monitor inside the chamber
  • Temperature monitoring outside the chamber
  • Wafer fab equipment temperature monitoring
  • Semiconductor and FPD processing using RF and plasma

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