AESPUMP Ltd

Model ALTA Series - Digital Mass Flow Controller

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Designed for the most challenging semiconductor and high purity thin-film applications, the ALTA Series of digital MFCs has several technological enhancements, including multi-range, multi-gas capability to improve cost of ownership and to increase tool throughput in a variety of applications.

Increases Throughput and Performance

  • Reduces process cycle times due to fast gas settling times
  • Enables better chamber matching through increased mass flow controller accuracy
  • Increases tool uptime through reduction on 'No Problem Found' mass flow controller replacements
  • DeviceNet™ versions include embedded diagnostics software that allows users to check MFC functionality without removing the MFC

Reduces Overall Costs

  • Reduces mass flow controller inventory through multi-gas, multi-range capability
  • DeviceNet configuration significantly reduces mass flow controller cabling
  • Open standard DeviceNet protocol provides accessibility to key mass flow controller functions, including flow totalizer and selected trip points

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