Ametek Process Instruments - THERMOX

- Model ta7000 - Gas Purity Monitors

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The Need: Today's high purity manufacturing processes, especially those in the semiconductor industry, require extremely high purity process gases in order to protect product quality and ensure product yields. As a result, these processes become more complex and vulnerable to disruptions due to the expiration of flow components, component outgassing, and accidental purifier overload. It is crucial to detect contamination before it is spread throughout a gas piping network or facility.

The ta7000 series of gas chromatographs is designed for today's ultra high purity applications. The ta7000 platform includes a dedicated sample processing system, a single high sensitivity detector, and on-board data analysis electronics.

ta7000 sets the new standard for UHP trace gas monitoring:

  • Highest sensitivity
  • Broadest detection range
  • 24/7/365 reliability
  • Cost-efficient maintenance and operation
  • Best value and performance
  • On-board gas regulation
  • Carrier gas purifier
  • Rotorless valves
  • Proven chromatograph
  • Internal calibration system
  • RGD Reduction Gas Detector (ta7000R)
  • FID Flame Ionization Detector (ta7000F)
  • Preconfigured for use on specific types of gas

The ta7000 platform includes a dedicated sample processing system, a single high sensitivity detector and on-board data analysis electronics. Two distinct models are available and each is equipped to detect a wide range of common gas impurities:

  • ta7000R: H2 and CO RGD (Reduction Gas Detector) Detection limit below 500 ppt
  • ta7000F: CO2, CH4 and nonmethane hydrocarbons FID (Flame Ionization Detector) Detection limit below 500 ppt

AMETEK Trace Analytical is well known in the UHP gas industry as a leader in detector technology and for innovative gas analyzer design.

As semiconductor technology advances, wafer fabrication processes become more complex and vulnerable to disruption. To protect product quality and maintain yield, process engineers require their UHP gas distribution systems to comply with ever more stringent purity standards. The ta7000 gas purity monitors are designed specifically to meet the newest challenges faced by the semiconductor industry.

Over time, gas distribution systems are susceptible to upsets due to expiration of flow components, component outgassing, and accidental purifier overload. It is crucial to detect contamination before it is spread through the vast network of gas piping runs.

Continuous monitoring of UHP gas identifies an upset before it becomes a crisis. The table on this page illustrates that it is not enough to monitor just for oxygen and moisture. The first breakthrough contaminants released by purifiers are hydrogen, carbon monoxide, carbon dioxide and methane. ta7000 monitors are the only instruments capable of selectively and automatically measuring all of these impurities in UHP bulk gases.

The EDL integration mode is one of the many enhancements that lend the ta7000 analyzers their unparalleled sensitivity during continuous operation. EDL employs an advanced algorithm to isolate measurement signals while filtering out random electronic noise. The result is an accurate and highly precise profile of the quality of your bulk gas.

A ta7000 system provides assurance that your house gases comply with specifications where it matters most—at the source of the UHP gas distribution system. By monitoring this point of reference you can continuously validate and defend the quality of purified gas at this most critical juncture.

Every ta7000 Gas Purity Monitor is manufactured and tested to the same standards of quality and performance you have come to expect from Trace Analytical. Since 1989 we have supplied the semiconductor industry with high purity gas monitors known for their extreme sensitivity and long term dependability.

AMETEK Process Instruments, the manufacturer of Trace Analytical products, combines technical innovation with a corporate commitment to excellence in support. We focus on a responsive, partner-oriented relationship with our customers. This includes regularly scheduled training and worldwide postinstallation support that is unexcelled in the industry. Our mission: to give our customers complete confidence in our systems and the people who support them.

Designation Specifications

Performance

  • Accuracy, EDL Mode: Greater of ± 0.25 ppb H2; ± 0.25 ppb CO; ± 10% of reading
  • Range: 0 to 199.9 ppb
  • Response Time: 5 minutes to 99% response; 30 minutes to
  • 75% response in EDL mode. Response time is independent of sample concentration.
  • Ambient Operating Temperature: 60 to 90°F (16 to 32°C)
  • Sample Compatibility: Specific models available for N2, Ar,
  • He, or O2 analysis
  • Resolution, Display: 0.1 ppb
  • Resolution, Communication Ports: 0.01 ppb

Sample Gas Supplies

  • Inlet Pressure Range: 70 to 90 psig (4.8 to 6.2 bar)
  • Inlet Pressure Stability: ±2%, regulator required
  • Return Pressure: Atmospheric vent is optimal; ± 0.5 psig max.
  • Flow Rate: 300 cc/min minimum; sample bypass at 50 cc/min.
  • Temperature: 60 to 100°F (16 to 38°C), optimum when temperature maintained ± 2°C
  • Maximum Impurity Levels: 200 ppb moisture, CO2, Hydrocarbons

Chassis

  • Dimensions: (HxWxD) 7 x 16.8 x 26.5 in. (18 x 43 x 67 cm )
  • Weight: 35 lb. (15.9 kg)
  • Power: 100 - 120 VAC, 50/60 Hz; 200 - 240 VAC, 50/60 Hz

Gas Ports

  • Carrier/Sample Inlet: 1/4-inch face seal fitting
  • Actuator Air: 1/8-inch VICI compression
  • Sample Outlet: 1/16-inch VICI compression
  • Aux (Calibration): 1/16-inch VICI compression

Outputs

  • Display: LCD graphics, backlit, 100mm x 150mm
  • Printer Port: Concentration, chromatogram, and diagnostic reports
  • Serial PLC Port: Concentration data and alarms via RS-232
  • 4 to 20mA (optional): Concentration signals and status relay Contacts

Detection Limit Specifications

Performance

  • Accuracy, EDL Mode: Greater of ± 0.25 ppb CH4; ± 0.5 ppb CO2; ± 1.0 ppb NMHC; ± 10% of reading; ± 1.0 ppb CO
  • Range: 0 to 199.9 ppb
  • Response Time: 10 minutes to 99% response. 60 minutes to 75% response in EDL mode. Response time is independent of sample concentration.
  • Ambient Operating Temperature: 60 to 90°F (16 to 32°C)
  • Sample Compatibility: Specific models available for N2, Ar,
  • He, O2, or H2 analysis
  • Resolution, Display: 0.1 ppb
  • Resolution, Communication Ports: 0.01 ppb

Sample Gas Supplies

  • Inlet Pressure Range: 70 to 90 psig (4.8 to 6.1 bar)
  • Inlet Pressure Stability: ± 2%, regulator required
  • Return Pressure: Atmospheric vent is optimal, ± 0.5 psig maximum
  • Flow Rate: 300 cc/min minimum, sample at 50 cc/min.
  • Temperature: 60 to 100°F (16 to 38°C), optimum when temperature maintained + 2°C
  • Maximum Impurity Levels: 200 ppb Moisture, CO2, Hydrocarbons

Chassis

  • Dimensions: (HxWxD) 7 x 16.8 x 26.5 in. (18 x 43 x 7 cm)
  • Weight: 35 lb. (15.9 kg)
  • Power: 100 - 120 VAC, 50/60 Hz; 200 - 240 VAC, 50/60 Hz

Gas Ports

  • Carrier/Sample Inlet: 1/4-inch face seal fitting
  • Sample Inlet: 1/4-inch face seal fitting (H2 and O2 models only)
  • FID Air: 1/16-inch VICI compression
  • FID H2: 1/16-inch VICI compression
  • AUX (Calibration): 1/16-inch VICI compression
  • Sample Outlet: 1/16-inch VICI compression
  • FID H2 Shut-Off: 1/8-inch VICI compression (Supplied at 57 psi (3.9 bar))
  • Actuator Gas: 1/8-inch VICI compression Outputs
  • Display: LCD graphics, backlit, 100mm x 150mm
  • Printer Port: Concentration, chromatogram, and diagnostic reports
  • Serial PLC Port: Concentration data and alarms via RS-232
  • 4 to 20ma (optional): Concentration signals and status relay contacts

Sample Gas

  • Inlet Fitting: 1/4-inch face seal fitting*
  • Inlet Pressure Range: 70 to 90 psig (4.8 to 6.2 bar)
  • Inlet Pressure Stability: ± 2%, UHP regulator required
  • Vent pressure: Atmospheric pressure vent is optimal, + 0.5 psig maximum
  • Flow Rate: 300 cc/min minimum, sample bypass at 50 cc/min

Calibration Gas

  • Inlet Fitting: 1/16-inch VICI compression fitting
  • Cylinder Concentration: 5 to 10 ppm H2, CO, CH4, CO2, and ethane (C2H6), balance nitrogen
  • Cylinder Volume: 100 cubic feet minimum (2800L)
  • Supply Pressure: 80 to 90 psig (5.5 to 6.2 bar)
  • Consumption: Approximately 1.0 L per calibration (4 to 8 L/month), automatic shut off between calibrations

* 1/4-inch face seal x 1/16-inch adapter fittings are available from Trace Analytical

FID Hydrogen

  • Inlet Fitting: 1/16-inch VICI compression fitting
  • Inlet Pressure Range: 50 to 60 psig (3.4 to 4.1 bar)
  • Inlet Pressure Stability: ± 2%, UHP regulator required
  • Flow rate: 35 cc/min
  • Purity: Hydrocarbons, CO, CO2 < 1 ppm

FID Air

  • Inlet Fitting: 1/16-inch VICI compression fitting
  • Inlet Pressure Range: 50 to 60 psig (3.4 to 4.1 bar)
  • Inlet Pressure Stability: ± 2%, regulator required
  • Flow Rate: 250 cc/min
  • Purity: < 1 ppm total hydrocarbons, dew point < - 65°C

Nitrogen Carrier Gas (for Oxygen and Hydrogen models only)

  • Inlet Fitting: 1/4-inch face seal fitting*
  • Inlet Pressure Range: 70 to 90 psig (4.8 to 6.2 bar)
  • Inlet Pressure Stability: ± 2%, UHP regulator required
  • Flow Rate: 300 cc/min
  • Purity: 99.9999% (< 1 ppm total impurity content)

* 1/4-inch face seal x 1/16-inch adapter fittings are available from Trace Analytical.

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