Chrysalis Scientific Technologies Inc.

Chrysalis Scientific Technologies Inc.

- Ammonia Gas Purifier



NHX-Plus is an inorganic purification medium that not only removes H2O, CO2 and O2, but also removes hydrogen sulfide (H2S) and hydride impurities, such as silane, germane and siloxanes. NHX-Plus offers the highest lifetimes for the removal of moisture and the best efficiency to remove carbamates (NH3-CO2 complexes). NHX-Plus has a wide range of applications, including next generation gallium nitride MOCVD processes, and is available in a wide range of purifier sizes: point-of-use to bulk purifiers.

  • Direct purification of NH3 used in ultra-high purity applications
  • Ideal for GaN and SiN processes
  • Highest Lifetimes
  • Best Impurity Removal Efficiencies
  • Removes: H2O, O2, CO2, H2S and dopants: GeH4, SiH4, and siloxanes
  • Improves and ensures gas purity for process consistency
  • Improves process yields & device quality
  • No external power source required
  • Does not require heating or cooling


  • < 45 ppb H2O in NH3 by FTIR, LDL

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