Jupiter Scientific

Jupiter Scientific

- Callisto Dry Scrubbing Units

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Jupiter Scientific’s Callisto Dry Scrubbing units offer affordable and efficient abatement for a very wide variety of gases. The destruction and removal efficiency of Callisto Dry Scrubbers is unmatched by any point of use abatement system on the market. In all cases we promise output concentration below threshold limit values. Our Callisto Dry Scrubbers are also versatile because if your process changes you can feel confident that your scrubber will not become obsolete. A simple modification of the gas sensor and software along with use of an appropriate scrubbing cartridge will allow your scrubber to move to a new process.

A Partial List of Processes and Gases that Callisto Dry Scrubbers Abate

  • PECVD
  • TEOS
  • ION IMPLANT
  • CIGS
  • Metal Etch
  • Dry Etch
  • Hydrides (e.g. Arsine, Phosphine, Diborane, Silane, Hydrogen Selenide)
  • Halogens (e.g. Chlorine, Fluorine, Bromine)
  • Acid Gases (e.g. HCl, HF, HBr)
  • VOC
  • Aromatics
  • Mercury
  • Hydrogen Sulfide
  • NOX
  • CO
  • Ozone

Key Features of Callisto Dry Scrub Units

  • Low pressure drop
  • DRE > 99.9%
  • Integrated flow management
  • Extremely low utility usage
  • Ethernet connectivity
  • Real-time data logging
  • Callisto Dry Scrub units offer a passive abatement solution that is available even in the event that your facility loses all utilities.

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