PMS - Model Chem 20 - 20 nm Chemical Particle Counter
From Contamination Monitors - Liquid Particle Counters
20 nm Online & Sample Particle Monitoring. Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the Chem 20 Chemical Particle Counter from Particle Measuring Systems (PMS) supports the International Roadmap for Devices and Systems (IRDS) and a large variety of chemicals. Sensitivity range: 20 - 100 nm.
Product Details
Extensive data on chemical distribution and packaging systems proves that the Chem 20 chemical particle counter, with 20 nm sensitivity, detects larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.Supporting both online and sample based monitoring, the Chem 20 particle counter provides flexible monitoring from incoming QC to point of use.
Product features
- Overcoming Background Scatter
- Laser Safety
- Sensing Bubbles in Sample Flow
- Handling a Reduction in Sample Flow
- Leak Detection
- Obtaining Stable and Repeatable Data
We are changing the way you monitor critical fab environments.
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World’s most sensitive particle sensor for high purity process chemicals
Without measurement there is no control
Leading-edge microelectronic processes require very clean process chemicals that are highly filtered and regulated to a particle size of 20 nm or below. With 20 nm particle sensitivity, the new PMS Chem 20 Chemical Particle Counter is the world’s most sensitive particle sensor for high purity process chemicals.
Extensive data on chemical distribution and packaging systems proves that the PMS Chem 20 sensor, with 20 nm sensitivity, detects larger concentrations of particles with better statistics than competitive products. The Chem 20 Chemical Particle Counter is a valuable tool that enables facility and process engineers to quickly detect and characterize chemical particle sources before they impact process and device performance.
Features
- Advanced laser optics and detectors enable detection of 20 nm polymer and 9 nm metallic particles in chemicals
- On-board chemical flow meter to set sample flow
- First particle counter optimized for low and high refractive index chemicals for improved performance:
- Chem 20 sensor, for chemicals with lower indices of refraction
- Chem 20-HI sensor, tailored for sulfuric acid and other higherindex chemicals
- On-board leak detection to provide alarm upon an internal chemical leak
- Low-flow detector and alarm to ensure consistent data
- Bubble detector to optimize data and protect sensor
- Syringe sampling with the SLS-20 syringe liquid sampler
- Two view modes optimize instrument operation for very dirty or very clean applications, extending product application space
- Local data display
- Flexible communications systems support legacy data acquisition systems
Benefits
- Detect 20 nm PSL and 9 nm Au particles in real time
- Detect yield-limiting particles (not possible with competitive technologies)
- Easy online and offline 20 nm testing
- React quickly to particle excursions long before surface scan or yield data are available
- Optimize chemical delivery systems from the loading dock to pointof-process
- Tighten process control limits through improved sample population statistics
Applications
- Real-time particle monitoring within chemical distribution systems
- Point-of-process monitoring
- Chemical packaging operations monitoring
- Chemical filter performance and efficiency characterization
- Chemical QA and verification
- Performance testing of chemical handling components
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